RESEARCH
The goal of the Microsystems Laboratory is to develop integrated sensors and sensor systems, MEMS and BioMEMS devices fabricated by silicon or polymer micromachining and nanotechnology solutions. The activity covers the research of novel sensing principles, technology solutions and functional materials systems.
The application of micromachining technology enables the miniaturisation of analytical systems and integration of various functions of sample preparation, sensing, readout, actuation or communication, respectively. The laboratory is focusing on the development of mechanical, physical, chemical (and biochemical) sensors, functional micro- and nanofluidic devices, implantable microsystems and infrared LED.
Our research directions fit to the European and Hungarian strategic roadmaps and directives (S3 - National Smart Specialisation Strategy) by the following research topics:
Healthy society & wellbeing:
BioMEMS, Lab-on-a-Chip, Organ-on-a-Chip, microfluidic systems, implantable, wearable devices, personal medicine, continuous monitoring, etc.
Vehicle technologies:
Driving safety sensors
Clean and renewable energies:
Low consumption electronics, sensors for energy industry, characterisation photovoltaic systems,
Sustainable environment:
Environment safety sensors (water monitoring), gas sensors (smart home, smart clothes)
Healthy
food:
Food safety sensors, spectroscopy
Research group structure in the Microsystems Laboratory
The development of MEMS devices requires solid design capacity and advanced cooperation among the research and technical staffs for precise operation of the full micromachining fabrication line. Actually, 10 researchers, 9 engineers / PhD student and 3 technicians work for the Laboratory with close and flexible cooperation with the colleagues of the Nanosensors Laboratory.
MEMS / smart sensors
(Csaba Dücső, Ferenc Bíró, János M. Bozorádi)
The team’s primary expertise is traditional MEMS sensor development, such as gas, environmental and mechanical sensors with an emphasis on the technology of 3D microstructure implementation.
BioMEMS, medical applications
(Péter Fürjes, Csaba Dücső, János M. Bozorádi)
Silicon based sensor development and their electro-mechanical integration, specifically for medical applications, are the long-term goals in this topic. The medical field demands the development of tools in low numbers that have extensive added value, which also aligns with the European strategic directives. The topic includes Si and flexible integrated microstructure development as subcontractors in the National Brain Programme.
Lab-on-a-Chip / Organ-on-a-Chip
(Péter Fürjes, Anita Bányai, Lilia Bató, Dóra Bereczki, Orsolya Hakkel, Petra Hermann, Zsuzsanna Brigitta Sik, Zsombor Szomor)
The Lab-on-a-Chip and Organ-on-Chip systems are essential building blocks of Point-of-Care diagnostic and drug analytical tools in the medical field. We have vast experience in this topic, especially in microfluidics. Accordingly, we actively collaborate with companies and universities in this field (77 Elektronika Kft., University of Pécs) as well.
IRLED / spectroscopy
Zoltán Szabó, Barbara Beiler, Orsolya Bálint-Hakkel, János M. Bozorádi
We fabricate and develop a few thousand infrared LEDs per year (partners: Anton Paar, Senop). Additionally, we envisaged a larger scope spectroscopic development and application in the frame of an actual ECSEL grant. Environmental analytics and food safety applications could be important goals for IR spectroscopy and other optical developments.
Integrated systems / Heterogeous integration / IoT
Péter Földesy, János Márk Bozorádi
Research grants ask for a certain level of preparedness, which usually includes demo systems (sometimes prototypes). Therefore, the requirements of developed instruments and their electro-mechanical integration are becoming a greater task.
Technology, FEM / Multidomain Modelling
Eszter Leelőssyné Tóth, Anita Bányai
Modelling, such as digital twin, is a widely applied method in engineering practice. It speeds up development and manufacturing time of prototypes while also lowering costs. The application of these methods is not as straight forward for the development of microstructures due to the effects of microenvironments. However, the use of these simulations is indispensable. The group is effectively corroborating the research and development tasks.
